ZS-500 , ZS-700 High Vacuum Coating System for Optical and Electronic Industries

高真空光學多層鍍膜機

簡介

        此設備為最新型箱式光學多層鍍膜機。方箱型不�z鋼工作室提供寬闊的工作面積，並配以大容量抽氣系統; 光學測厚系統固定裝在箱形工作室上部; 整機安裝到淨化工作室方便容易。

        該設備運用於光學薄膜技術中蒸鍍多層膜、高反射膜、寬(窄)帶濾光片。是光學儀器、激光工業、眼鏡及照相等行業科研及生產之必需設備。也運用於電子工業中蒸鍍機型元件薄膜電路等。

        此兩型設備真空性良好，機械結構可靠耐用，穩定的膜厚測試系統工作精度高，多坩堝帶有 H-Y 掃描的磁偏轉電子檢蒸發源，並具有新型的箱式結構外形，操作方便。

　

特點

        使用高性能抽氣機組。

        此兩型設備分別配以 f400及 f600擴散泵抽氣系統，使工作室達7x10^-2Pa低於15分鐘，極限真空達6.6x10-4Pa

, 在工作狀態下(電子槍、烘烤、轉動)真空度可保持在1.3x10^-2Pa 以上。

        工作室內各裝置符合使用要求。

        此兩型設備箱體容積分別為648x668x790和770x800x916,為蒸發源等裝置的安裝提供了足夠大的底板位置。室內工件盤可根據用戶需要，制為球面盤和平面盤，工件轉動平穩。ZS-700可另配有三只盤式行星轉動裝置，每盤直徑為 f430。

        帶有溫度控制儀的碘鎢燈烘烤功率分別為 3kW 和 4.5kW, 以保證基片溫度達300^。C要求。

        具備大功率的270。磁偏轉四坩堝電子槍和兩套電阻蒸發電源，及兩組氣動控制的蒸發擋板。

        結構新穎的 3kW/0.6kW 離子轟擊能滿足使用要求。

        工作穩定的高精度膜厚測試系統。

        本機為提高膜厚測試精度，對系統的主要配件及結構件作了慎重的選擇和考慮。

        主放大器MK-1型，光棚單式儀WDG-30型，光電倍增管GDB-423型， 高壓電源FH-426B 型，穩定直流電源CG-4型，帶有直接驅動調制光板的39L1224型調制電機，光束會聚於調制光板、比較片、接收光孔及單色儀入口。

        光譜波長範圍3000~8500A。其他波長範圍可調節單色儀光棚線數解決。

　

　

規格/型號:                                                         ZS-500                         ZS-700

工作室尺寸:       

箱式(長x寬x高)                                                 648x668x790mm       770x800x916mm

工作盤最大外徑                                                f550mm                     f650mm

極限真空                                                           6.6x10^-4Pa                   6.6x10^-4Pa

抽氣時間                                                           7x10^-3Pa<15min          7x10^-3Pa<15min

蒸發源、多坩堝偏轉

電子槍帶 X、Y掃描、電阻蒸發源(兩套)      5kW                             5kW

工件烘烤溫度和功率                                       300^。C / 3kW             300^。C / 4.5kW

工件轉速(轉每分)                                             0~30r / min                  0~30r / min

離子轟擊                                                           0.6kw / 3kv                  0.6kw / 3kv

擴散泵                                                               k-400                            k-600

機械泵                                                               2X-30A                        2X-70A

膜厚測試系統                                   MK-1                                             MK-1

                                        System Extreme Value Method      System Extreme Value Method

真空測量                                                           CG-Z                            CG-Z

平均功率                                                           20kW                          32kW

佔地面積x高(m)                                                2.5 x 2.6 x 2m            2.7 x 2.85 x 2.74m

Brief Introduction

        Model ZS-500 and Model ZS-700 are cabinet-shaped optical multi-layer coating systems, designed recently to repiace the previous products of our factory so as to improve the operation functions of the systems. The square stainiess steel chamber provides spacios working area, where large capaclty pumping system can be installed and the optical film-thickness monitor system can be fixed on the upper part of the chamber. The whole system can be easily installed in the cleaning room. For the optical film coating, both models are suitable for coating multi-layer film, high-reflecting film, high-transparent film and wide(narrow)band filter glass, and for the utilization in both scientific research and production. They are the necessary equipments in the optical instrument industry, such as laser-producer, eye-glasses, camera and so on, and also suitable for the evaporization of metais on micro-components in electronic industry.

        These two models provide high operation vacuum, reliable an durable mechanical structure, high-accuracy of the stable film-thickness monitor system, the multi-crucible sources with the magnetically deflected electron beam gun scanning in x-y directions. The cabinet-shaped structure is new in appearance and the systems are easy to be operated.

Large Capacity Pumping Systems

         f400 and  f500 diffusion pumping systems are mounted to both models respectively, so that the pumping is highly efficient. The vacuum chambers can be pumped to 7x10-3pa within 15 minutes, with the ultimate vacuum of 7x-5Pa. Under the working condition (operating the electron beam gun, baking and turning the system) the vacuum can be maintained at least 1.3x 0-3Pa.

　

Perfected to Meet Working Reguirements

        The dimensions of the cabinets of Model ZS-500 and Model ZS-700 are 648x668x790mm and 770x800x916mm respectively, offering a space large enough for installing baseplate of evaporation source unit. Two Ways of Driving Substrates: spherical driving and plane driving, smoothly turning the substrates. In addition, Model ZS-700 is attached with a three-plate-types  planetary substrate holder, each plate of f430mm.

        The baking power of lodo-tungsten lamp with a temperature controller is 3kW or 4.5kW, so as to keep the substrate at temperature up to 300•C.

        There is one set of the quad-crucible electron gun with sufficient power magnetically deflected in 270。, two sets of resistance evaporation power sources , and two sets source shutters controlled by pneumatic pump.

        The newly-structured 3kV / 0.6kW glow discharge can meet the requirement of ion bombardment.

        The measurement of the film-thickness is quite accurate and the operation of this monitor is stable.

        All the main parts and components in both systems are selected with great care in order to meet the accuracy in measuring the thickness of the film.

        Each system includes MK-1 main ampllfler, WDG-30 optical grating spectrograph,  GDB-423 photo-multipller, FH-426B high-voltage supply, WY-1 stabillized d.c. supply, adjustable motor with directly-driven light modulator, the light focusing on modulator, comparator, light receiving hole and monochrometer entry,

        The wave length of the spectrum ranges from 3000A to 8500A (the other wave length can be achieved by adjusting the grating numbers of the mono-chrometer).

                                                         ZS-500                          ZS-700

　

Vacuum Chamber                          648x668x790mm             770x800x916mm

　

Maximum outer diameter              f550mm                          f650mm

of the substrate holder

　

Ultimate Vacuum                            6.6x10-14Pa                    6.6x10-4Pa

Pumping Time                                7x10^-3Pa<15m In            7x10^-3Pa<15min

Evaporation Source                         5kW                                5kW

Baking Temperature and Power     300^。C / 3kW                 300^。C / 4.5kW

Revolving Speed of Substrate         0~30r / min                      0~30r / min

Ion Bombardment                          0.6kw / 3kv                      0.6kw / 3kv

Diffusion Pump                               k-400                               k-600

Mechanical Pump                           2X-30A                           2X-70A

　

Film-thickness                                MK-1                                MK-1

Monitor System              System Extreme Value Method      System Extreme Value Method

　

Vacuum Gauge                               CG-Z                                CG-Z

Average Power                                20kW                               32kW

Overall Dimension(m)                     2.5 x 2.6 x 2m                   2.7 x 2.85 x 2.74m